Process Engineering/Optimization 

Support for categories below

• High Current Ion Implantation
  
• High Energy Ion Implantation
  
• Medium Current Ion Implantation
  
• Flash Anneal
• Laser Anneal

Support and Consulting

• Process and tool evaluation
  
• Tool stability, Advanced Process Control and SPC
  
• Tool selection, testing and qualification for production
  
• Tool monitoring, recipe optimization
  
• Trouble shooting
  
• Improvement for process and productivity gain
  
• Design of experiments for process improvement according technology needs
  
• Defectivity reduction and yield gain
  
• Process transfer and documentation
• Staff training